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Desktop UV-Ozone Cleaner with 12x 12" Chamber and Heating Stage up to 150ºC - EQ-PCE-22

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Item Number: EQ-PCE-22
Transported by LTL Freight (Truck)


     PCE-22  is a desktop Ultraviolet (UV) Ozone cleaner with substrate heater,  which is used for cleaning all types of substrates to achieve better thin film quality at low cost. Also, it is an excellent tool to remove and strip photoresist, improve surface wettability, Clean SEM & TEM samples, UV polymer activation, assembly etc.
   UV-Ozone Cleaner has proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm UV light. Under air and room temperature, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants. 

Input Power
  • AC 220V, 50/60 Hz, (110VAC available upon request )
  • Power 350 W Max.
Environment Requirement
  • Indoor Use Only; Altitude Use Up To 5,500 Feet;
  • Temperature Range 41-104 Degrees Fahrenheit;
  • Maximum Relative Humidity 80%, Up To 87 Degrees Fahrenheit Decreasing Linearly to 50% Relative Humidity At 104 Degrees Fahrenheit;
  • Main Power Supply Fluctuations Not To Exceed 10% Of The Nominal Voltage; Overvoltage Category II;
  • Pollution Degree 2; ozone level (ambient) measurement at <45 ppb.
UV Lamp
  • Solid metal double wave mercury lamp 
  • Wave Length: 253.7nm and 184.9nm 
  • UV lamp service life:  5000 hrs
  • UV light area: 200 x 200 mm 
  • Can clean crystal wafer with diameter up to 12“
  • The fragile UV lamp does not include in any warranty, please click to order spare.
Chamber & Sample Stage
  • Stainless steel case
  • Sliding drawer for easy sample loading
  • Sample stage area is 310 mm x 320 mm ( ~12"x12" )
  • Ozone venting device is built in the chamber
  • Timer ranges from 0.01 seconds to 99.9 hours.
Heatable Sample Stage
  • Sample stage is heatable up to 150ºC with precision temperature controller
  • Temperature controller is 20 segments programmable with +/-2 C accuracy
  • Temperature uniformity:<10C within 6 inches diameter area; <20C within 12 inches diameter
  • Heating rate: 15C max. 
  • The distance between sample stage and lamp is adjustable from 20mm  to 40mm.
Vent Port

  • 3 in. diameter vent port is built in the back of the machine
  • One 10 ft. flexible pipe and one vent clamp are included for connecting the cleaner exhaust to a lab venting system.

  • 510mm x 350mm x 400mm (W x H x D)
Net Weight
  • 62 lbs
  • Meet NRTL safety standard
  • NRTL certification is available upon request at extra cost
Warranty One-year limited warranty with lifetime support. The fragile UV lamp is not included in the warranty.
Operation Manual & Video

  • Clean silicon wafer, Gallium Arsenide wafer, quartz  and ITO glass
  • Clean all types of oxide single crystal substrate such sapphire, STO, and LAO.
  • Clean gold and Pt surface
  • Oxidizing surface of light metallic material
  • Activate Polymers and Crosslink Polymers
  • UV Strip Photo Resist / Photoresist
  • UV Clean Production Line LED displays

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3. The prices listed are subject to change without notice.