High Vacuum Chamber (18"x17" x20" ) For DIY Sputtering coating system (for up to 5 sputtering sources) - HVC-SS

• Vacuum chamber is made of 304 stainless steel with reinforcing rib 
• Inside vacuum chamber size:  470mm L×445mm D×522mm H  (~ 105 Liters ， 18.5“x17.5"x 20.5")
• Round 380 mm Dia. hinged type door with 150 mm Dia glass window
• Vacuum sealed 150mm diameter glass window is installed on the front door for easy observation
• Silicone O-ring can be used for all vacuum seals.
• Temperature range: -15 to 150°C

• 4E-3 torr by mechanical pump (click here to order mechanical pump)
• 4E-5 torr by turbo pump (click here to order turbo pump) Note: Vacuum pump is sold separately.

• One KF40 port built on the right side of the chamber to connect to the vacuum pump.
• Four KF25 ports built in the chamber, 3 in left and one in right
• Three 1/4" BSPP fittings with needle valve are installed for gas inlet & outlet ( 2 at the back and 1 on the left)
• One 1/8 NPT port installed on top of the chamber to connect a vacuum gauge.
• Top plate is removable to made customized port and fitting
• Customer fitting and port are available upon request

• Optional 1" sputtering heads (up to 5 sputtering sources) or 2" sputtering heads (up to 3 sputtering sources)
•      
             HVC-SS-1                        HVC-SS-2                       HVC-SS-2-II

Optionals

• Please click picture below left 1- 2  to choose vacuum gauge at extra cost
• Please click picture right to choose a vacuum pump station, which the vacuum chamber can be put on its top

           （click to see other components)

Dimension

Operation

Warranty

• Three years limited warranty