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Anti-corrosive vacuum chucks with O-Ring with different sizes FOR VTC-100PA - MTI-VTC100PA

Sale Price: Replacement Part for Existing Customers
If you are international, please click this.

Product Options

Oring I.D. Size:


Extra O-Ring

Model No.




(In Standard Package of VTC-100PA)

Optional Upgrade Product for VTC-100PA with Heating Cover


Polypropylene (PP)

(High-performance anti-corrosion)
(Higher thermal resistance performance)

Max working temperature Max. 120C Max.200C (several minutes)
Size Oring size Φ44mm (For 4-inch wafer) Oring size Φ44mm (For 4-inch wafer)
Oring size Φ10mm (For 1-inch wafer) Oring size Φ10mm (For 1-inch wafer)
Max working temperature
for Vacuum Chuck only,
  • For VTC-100PA Spin system, Max. 120C (several seconds or minutes)
  • For PTFE Vacuum Chuck only, Max. Operating temperatures are 250C 
  • PTFE Heating cover is capable of drying temperature up to 200C. Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Please contact us for the quote.

Operation Instructions

Click the picture to watch demo video for how to use 10mm vacuum chuck hold 5mm sample.
  • Please contact us to order MTI-VTC100PA-ORING
Application Note
  • If anyone is trying to use the Heating cover over 120C, PTFE Vacuum Chamber is required. Please email us with your desired temperature and size for a quotation.

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2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.