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Anti-corrosive vacuum chucks or O-Ring with different sizes FOR VTC-100PA, MTI-VTC100PA

Sale Price: Replacement Part for Existing Customers
If you are international, please click this.

Product Options

Oring I.D. Size:


Extra O-Ring

Model No.




(In Standard Package of VTC-100PA)

Optional Upgrade Product for VTC-100PA with Heating Cover


Polypropylene (PP)

(High-performance anti-corrosion)
(Higher thermal resistance performance)

Max working temperature Max. 120C Max.200C (several minutes)
Size Oring size Φ44mm (For 4-inch wafer) Oring size Φ44mm (For 4-inch wafer)
Oring size Φ9mm (For 1-inch wafer) Oring size Φ9mm (For 1-inch wafer)
Max working temperature
for Vacuum Chuck only,
  • For VTC-100PA Spin system, Max. 120C (several seconds or minutes)
  • For PTFE Vacuum Chuck only, Max. Operating temperatures are 250C 
  • PTFE Heating cover is capable of drying temperature up to 200C. Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Please contact us for the quote.

Operation Instructions

Click the picture to watch demo video for how to use 9mm vacuum chuck hold 5mm sample.
  • Please contact us to order MTI-VTC100PA-ORING, ( 12mm 45mm for Φ44mm chuck)
Application Note
  • If anyone is trying to use the Heating cover over 120C, PTFE Vacuum Chamber is required. Please email us with your desired temperature and size for quotation.

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.