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Hybrid PVD Coater in Glove-box: One 2" RF Sputtering + Two Evaporation Sources - VTC-H3-GB
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Item Number: VTC-H3-GB
Transported by LTL Freight (Truck)
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VTC-H3-GB is a special PVD coating system in the glovebox, which consists of one RF plasma sputtering head and two evaporation crucibles for research of solid-state battery. The RF plasma gun is for coating solid electrolyte on the cathode electrode and one evaporation source is for coating Lithium on the solid electrolyte, and another evaporation source is coating copper film on the lithium to form a sealed solid-state battery.
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